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Key Points for Renovation of Clean Rooms & Dust-Free Purification Workshops
2026/6/22
Current status inspection + demand positioning: Conduct comprehensive parameter inspections including cleanliness (particles, microorganisms), temperature and humidity, pressure difference, air flow pattern, wind speed, illuminance, noise, vibration, VOC, static electricity, etc.; clarify the post-renovation level (ISO1-9/FED-STD-209E), production capacity, process requirements (such as micro-vibration control in the lithography area, corrosion prevention in the wet process area), and regulatory/client certification requirements.
Risk and Feasibility Analysis: Assess the bearing capacity of the building structure (new FFUs, ducts, ceilings, equipment), the redundancy of the existing system, the shutdown window period, the construction pollution risk, and the renovation budget; Develop a phased construction + temporary clean-up plan (such as partial fencing, temporary FFUs, and personnel movement line isolation).
Drawing and design of plans: Update the plans for the clean room layout, air flow organization, HVAC, pure water/ special gas/waste liquid, electrical, automation control, and fire protection; Core parameters must be clearly defined: air change rate (ISO5 ≥ 240 times/h), pressure gradient (5-10 Pa for adjacent areas, ≥ 10 Pa for external), temperature and humidity accuracy (e.g., ±0.1℃/±1%RH); Simultaneously complete URS, FS, DS, and verification plans (IQ/OQ/PQ).
02. Core System Upgrade (Performance Core)
Building and enclosure structure renovation - Enclosure and sealing: Replace aged color steel plates and sealants (select silicone without volatility and suitable for clean environments); Optimize windows (double-pane tempered clean windows, airtight doors), wall sleeves, ceiling/floor joint sealing; Ground surface should primarily use epoxy self-leveling, PVC, or stainless steel to meet requirements for anti-static, corrosion resistance, and wear resistance; New ceilings need to consider FFU layout and maintenance space.
Structural reinforcement: Conduct structural calculations and reinforcement for the newly added equipment areas (such as lithography machines, etching machines), ventilation shafts, and machine rooms; for areas prone to micro-vibration, vibration-isolating foundations or floating floors need to be installed.
HVAC and Cleanroom System Renovation (The Core of the Core) Air Conditioning Units and Air Distribution System: Evaluate the performance of the existing AHU/MAU, and replace them with variable-frequency, high-efficiency filtration (primary G4 + secondary F8 + high-efficiency HEPA/ULPA) units when necessary; Optimize the duct layout, reduce bends, use stainless steel / galvanized steel ducts, and strictly prohibit air leakage; FFU/Fan Filter Units should be evenly distributed, and control the uniformity of wind speed; New exhaust systems (such as process exhaust, chemical exhaust) should be added, and activated carbon / chemical filters should be installed to avoid cross-contamination.
Air flow organization optimization: For ISO5 and above, vertical unidirectional flow (laminar flow) should be adopted preferentially. For ISO6-8, non-unidirectional flow (turbulent flow) combined with local unidirectional flow can be used. Set reasonable return air outlets and supply air outlets to avoid air flow dead zones; Verify the air flow pattern to ensure that particles are effectively removed.
Temperature, humidity and pressure difference automatic control: Upgrade the DDC control system to achieve closed-loop control of temperature, humidity, pressure difference, wind speed and ventilation frequency; Install redundant sensors to avoid single-point failures; Add interlock control (such as audible and visual alarms when FFU fails or pressure difference is abnormal, and activation of the backup system).
Auxiliary system renovation (supporting facilities) for pure water/ special gas/waste liquid systems: Renovate the pure water pipelines, replace old valves and filters to ensure water quality (such as UPW resistivity of 18.2 MΩ·cm); The special gas system needs to replace corrosive pipes and add leak detection and automatic cut-off devices; The waste liquid system needs to be classified and collect, and add neutralization/filtration equipment.
Electrical and Automation: New features include anti-static grounding, UPS backup power supply, clean lighting (with illuminance ≥ 300 lux), and explosion-proof electrical equipment (in the chemical area); The monitoring system has been upgraded to enable real-time monitoring and data traceability of cleanliness, temperature and humidity, pressure difference, and energy consumption.
Fire protection system: Cleanrooms should use clean-type sprinklers and gas fire suppression systems (such as IG541) to prevent fire water from contaminating the process equipment; new fire alarm and interlock control systems (such as联动 of the exhaust system and personnel evacuation) have been added.
03. Construction Control (Preventing Secondary Pollution and Ensuring Project Schedule)
Zone isolation + dust-free construction: Divide the clean area from the construction area, set up air showers, airlock rooms, temporary barriers, and control the movement paths of personnel and materials; Construction workers must wear clean suits, construction tools must be clean, and cutting and welding in the clean area is strictly prohibited (if necessary, use dust-free welding equipment).
Phased construction + production suspension arrangement: Prioritize the renovation of non-core areas, and for core areas, choose the production suspension window period for construction; Set up temporary clean environments (such as mobile clean sheds) to ensure the continuous operation of key processes.
Process inspection and quality control: During the construction process, regular inspections are conducted for cleanliness, temperature and humidity, and pressure difference. Air ducts, water pipes, and special gas pipes need to undergo pressure tests, leak tests, and cleaning; the enclosure structure of the clean room needs to undergo air tightness tests.
04. Verification and Handover (Compliance Delivery)
Phased verification: Complete installation confirmation (IQ), operation confirmation (OQ), and performance confirmation (PQ); The verification contents include cleanliness testing (particle counter), microbial testing (settling bacteria, airborne bacteria), temperature and humidity fluctuations, pressure gradient, air flow pattern, wind speed uniformity, noise, vibration, energy consumption, etc.
Document handover: Transfer complete renovation drawings, equipment manuals, inspection reports, verification reports, operation manuals, maintenance plans; Provide training for the operation and maintenance personnel.
Trial operation and optimization: During the trial operation period, continuously monitor the system performance and adjust the abnormal parameters; establish a regular maintenance plan (such as filter replacement, equipment maintenance, and cleanliness testing).
05. Key Risks and Pitfall Avoidance Tips
Avoid excessive renovation: Select the appropriate cleanliness level based on process requirements, and avoid blindly upgrading the level which leads to cost waste.
Prevent construction pollution: During the construction process, strictly control dust and volatile organic compounds to prevent any pollution to the existing equipment and the clean environment.
Avoid system mismatch: The HVAC system, pure water system, and special gas system must be compatible with the process equipment to prevent any bottlenecks.
Avoid compliance risks: The renovation plan must comply with local regulations and customer certification requirements, and communication with relevant departments should be conducted in advance.
