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Optical super clean room laboratory design

2024/11/6

Ultra-clean dust-free purification workshop is now an indispensable important hardware facility for industrial semiconductor, precision parts manufacturing, LED LCD plane production, optical lens manufacturing, precision electronic circuit board, SMT dust-free workshop, PCB purification workshop, photovoltaic new energy battery production, plastic chemical production, electroplating/spraying workshop. In the past ten years, Due to the faster and faster development of technological innovation, the demand for precision and miniaturization of products is becoming more and more urgent in society and industry, such as the miniaturization research of large integrated circuits on the miniaturization of its accessories, as well as the development of new energy, and the lightweight miniaturization of new energy battery pack production, all of which have become scientific research projects of great importance in science and technology all over the world. The demand in the electronics industry has also been requiring the design concept and construction technology of micro-electronic ultra-clean workshop must be developed with each passing day.

Optical microelectronics ultra-clean dust-free workshop layout requirements

1. Clean production area of purification workshop: clean level is set to hundred, thousand or thousand.
2. Dust-free production auxiliary room: the clean level is set to 10,000 and 100,000, which generally includes people entering and leaving the clean room, materials entering and leaving the clean area and some workshop office and living areas.
3. Ultra-clean purification workshop management area: the cleanliness level is set to 100,000 or 300,000, generally including offices, conference rooms, duty rooms and rest areas.
4. Special equipment area for workshop production: there is no requirement for air purification level in this area, but it is required to set effective physical or air isolation from the purification workshop. This area is mainly set up with purification air conditioning room, electrical room, pure water room and production gas room.

Optical microelectronics ultra-clean dust-free workshop decoration requirements

1. Workshop ceiling material: use FFU blind plate or fireproof color steel plate, the ceiling must be able to carry out detailed technology.
2. Workshop wall decoration materials: The use of fireproof color steel plate, the thickness of the color steel plate is 50mm, which can be effectively applied to the floor area of the site. The color steel plate needs to be grounded during installation to achieve the function of discharging static electricity.
3. Workshop floor decoration: epoxy self-leveling or PVC coil is generally selected, but the above two materials must be antistatic treatment in the dust-free workshop.

The air conditioning design of ultra-clean and dust-free purification workshop

1. Ultra-clean dust-free purification workshop purification principle
After solving the problem that ordinary decoration is easy to produce dust, the most important space purification measure for the ultra-clean room is the clean air conditioning system. The air conditioning unit uses the fan to filter part of the fresh air indoors and outdoors in the first effect, and then filters it in the middle effect. The two stages of filtration are completed in the combined air conditioning unit, and then pumped into the pipeline by the high static pressure fan. The end of the pipeline is connected to the same special air supply box as the room, the air supply box is equipped with a high efficiency filter plate, the air after the high efficiency filter enters the room, and takes away the tiny dust in the room through the flow route planned by the air conditioning system engineer of the purification workshop. The above process needs to be repeated different times according to the needs of different levels of purification. The parameters of this problem are given in the next section.
2. Ultra-clean dust-free purification workshop cycle parameters
① The dust-free workshop describes the number of room air exchange according to the level: The number of air exchange in the 100,000 purification workshop can not be less than 15 times per hour; 10,000 dust-free workshop ventilation times per hour can not be less than 20 times; The number of air changes in the thousand-grade clean room cannot be less than 50 times per hour; The 100-level ultra-clean room and the 10-level ultra-clean shed do not take the number of air changes as the standard, supply air in the way of all-day flower air supply, and return air in the way of all-ground air return, that is, increase the proportion of the area of the supply air and the return air outlet, and calculate the air supply volume of the purified combined air conditioning unit by controlling the air supply speed at 0.3-0.5m/s.
(2) The temperature and humidity control range of the ultra-clean dust-free purification workshop: winter > 16 degrees Celsius, summer < 26 degrees Celsius, the fluctuation range is ± 2 degrees Celsius; Humidity between 45-65%, specific to the survival of the product characteristics to determine the normal fluctuation range in ±5%, humidity at the same time in different quantity values on the indoor static electricity also has a special effect, so the humidity in the purification workshop should be considered comprehensively;
(3) Noise control: The noise in the ultra-clean and dust-free purification workshop is mainly based on the comfort of the staff, and the national noise standards stipulate that the noise in the working environment should be controlled to ≤65dB.

(4) Fresh air: In order to ensure the comfort of indoor controllers, fresh air should be properly added in the purification workshop according to the HVAC standard, and the fresh air volume is calculated according to the number of personnel, according to 50m³/h.

Optical ultra-clean room design on air conditioning materials clean requirements

1. The air supply pipe of the air conditioning system is made of galvanized steel plate. Considering the high wind pressure, it is recommended to use the medium pressure flange type air pipe. The external insulation material is rubber and plastic, which must be flame retardant to ensure fire safety.
2. High efficiency air supply can be made of cold rolled plate. There are stainless steel high efficiency air supply ports on the market at present, but the strength of stainless steel high efficiency air supply port is poor and it is easy to deform under high wind pressure. And the birth of stainless steel efficient air supply is mainly used for food enterprises SC production purification workshop, such workshops have strict requirements for the number of bacteria, but the purification level is low, the air supply volume requirements are relatively small, and the wind pressure is also small, which is different from the needs of optical micro-electronic clean clean workshop, so it is not recommended to use the air conditioning system of the clean clean workshop.
3. The return air outlet should be adjustable and open, and the fixed shutter return air outlet should not be used. The medium effect filter must be installed in the return air outlet in the ultra-clean and dust-free purification workshop, and regular cleaning is also needed in the daily use and maintenance of the clean workshop. The function of the adjustable tuyere is mainly to adjust the air flow organization of the ultra-clean dust-free area and the ordinary clean area. By adjusting the louvers on the return air outlet, the indoor and outdoor pressure difference can be adjusted.

Optical microelectronic ultra-clean dust-free clean workshop purification engineering design and construction scheme summary

In the design and construction process of such projects, purification engineers or air purification engineering suppliers must strengthen the full understanding and familiarity with the product characteristics of the optical microelectronics industry, and need to communicate more with the relevant technical personnel of the product development department of electronic products production enterprises. Combined with the specific production process and process requirements of optical microelectronics production enterprises to determine the required process plan, temperature, humidity, cleanliness, etc., but also consider the production enterprise's capacity planning and construction economic planning arrangements, comprehensive factors to determine what kind of air purification treatment program to use, only to achieve a balance in all aspects, Only in order to build a super-clean dust-free purification workshop that meets the production and operation requirements of production enterprises.