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Semiconductor wafer clean workshop construction
2024/8/30
A construction scheme
1. Workshop design
The design of semiconductor wafer clean workshop should follow the principles of modularity, standardization and humanization. Modular design is conducive to rapid construction and relocation, standardized design is conducive to ensuring the consistency of product quality, and humanized design can improve the working comfort of employees.
In the design process, it is necessary to determine the layout and functional area division of the workshop according to the product production process and process requirements. At the same time, it is necessary to rationally allocate the flow of people and logistics channels to ensure production efficiency and product quality.
2. Construction process
The construction process of semiconductor wafer clean workshop directly affects the cleanliness and stability of the workshop. In general, the construction process of semiconductor wafer clean workshop includes: foundation treatment, steel frame construction, color steel plate installation, door and window installation, clean pipeline system construction, electrical system construction, air conditioning system construction, lighting system construction and epoxy self-leveling ground construction.
In the construction process, it is necessary to strictly control the quality of materials and construction technology to ensure that the cleanliness requirements are met. In addition, energy-saving and environmentally friendly building materials and technologies should be used to improve the energy efficiency and environmental performance of the workshop.
3. Device configuration
The equipment configuration of the semiconductor wafer clean workshop should be selected and configured according to the production process and product needs. The main equipment includes: chip manufacturing equipment, air purification equipment, water treatment equipment, logistics equipment, etc.
In the process of equipment configuration, attention should be paid to the advanced nature, reliability, maintainability and energy saving of equipment. At the same time, it is necessary to rationally arrange the layout of equipment, reduce cross-contamination in the production process, and improve production efficiency.
Two technical features
1. Electrostatic control
Semiconductor wafers are very sensitive to static electricity, so clean rooms must have good static control capabilities. During construction and operation, use ESD materials and measures, such as laying ESD floors and wearing ESD clothes and gloves, to ensure that the static electricity in the workshop is controlled within a safe range.
2, gas flow control
Gas flow control is crucial to the production of semiconductor wafers. In order to ensure the stability of gas flow in the clean room, high-quality gas filtration equipment and air flow control systems should be used to achieve effective filtration and control of particles and harmful gases in the air.
3, temperature and humidity control
Semiconductor wafers are very sensitive to temperature and humidity. In the clean workshop, advanced air conditioning systems and humidity regulation systems should be used to ensure that the temperature and humidity in the workshop are controlled within the best range. At the same time, it is necessary to achieve real-time monitoring and regulation of temperature and humidity to ensure the quality of products.
Three quality management
The quality management of semiconductor wafer clean workshop construction should run through the entire construction and operation process. In terms of quality objectives, the cleanliness level of the workshop and product quality standards should be clearly defined, and a sound quality management system should be established. In terms of inspection and supervision mechanism, measures such as regular inspection, random inspection and completion acceptance should be implemented to ensure the quality and effect of various construction work.
Quadruple staffing
The personnel configuration of the semiconductor wafer clean workshop should include management personnel, technical personnel, maintenance personnel and cleaning personnel. Management personnel should have relevant management experience and ability, technical personnel should have professional skills and knowledge, maintenance personnel should be responsible for the daily maintenance and troubleshooting of equipment, cleaning personnel need to be responsible for the cleaning of the workshop.
In short, the construction of semiconductor wafer clean workshop is an important link to ensure semiconductor wafer quality and production efficiency. In the construction process, it is necessary to carry out comprehensive consideration and planning from many aspects such as design, construction process, equipment configuration, technical characteristics, quality management and personnel configuration to ensure the normal operation of semiconductor wafer clean workshop and the stability of product quality.
