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Installation plan for exhaust treatment equipment in cleanroom
2026/10/8
01 Pre-construction preparation and detailed design
Technical and drawing review: Before construction, a drawing review should be organized to confirm the positioning of the exhaust treatment equipment, the direction of the ducts, and the water and electricity interfaces. BIM technology can be used for collision checks to optimize the pipe routing and avoid excessive local resistance. On-site and material preparation: Clear obstacles in the construction area and ensure the site is level. Verify that the equipment model, specification, and design drawings are consistent, check for no damage to the appearance, and prepare certificates of conformity and test reports. Prepare detection tools such as anemometers, particle counters, and level meters to ensure they are within the validity period for calibration. Environmental control during construction: Set up dedicated entrances and exits, and clean tools and materials before entry. The ducts should be prefabricated in the dust-free area and sealed, and non-polluting materials (such as corrugated cardboard) must not be used. Cutting operations must be equipped with dust collection devices.02 Installation of exhaust treatment equipment
Foundation acceptance and positioning: Before the equipment is placed, the foundation needs to be inspected to ensure that the surface levelness is no more than 2‰ and the bearing capacity meets the requirements for the equipment weight. Special safety plans should be developed for equipment transportation and hoisting to prevent damage to the equipment. Equipment fixation and leveling: After the equipment is placed, use a level to check and adjust the levelness and verticality (the deviation should not exceed 2‰). Use bolts to firmly fix the equipment on the foundation or on an overhead support, and add flat washers and spring washers for anti-loosening. Internal cleaning and component filling: Before filling the adsorbent or filter materials, use clean air to blow the equipment interior to remove debris. Verify the active efficiency of the adsorbent and ensure that the filling method, layer height, and density comply with the design requirements.
03 Installation of exhaust ducts and connections
Pipe material and sealing requirements: Exhaust ducts should use smooth inner walls and corrosion-resistant stainless steel or galvanized steel plates. When the ducts pass through the clean room enclosure structure, a sleeve should be installed and a double-layer sleeve structure with elastic sealing materials should be used to ensure airtightness. Pipe laying specifications: For exhaust ducts conveying condensate water, the slope should not be less than 5%, and a drainage device with air-blocking measures should be set at the lowest point. The fixed ropes for outdoor exhaust ducts should not be connected to lightning rods or lightning nets, and the exhaust outlet should be located downwind of the prevailing wind. Flexible connections and vibration reduction: The equipment inlet and outlet should be connected with flexible short pipes, and the length should comply with the requirements of the instructions without any distortion. Rubber shock pads should be placed at the contact points between the supports and the ducts to reduce vibration transmission.
04 Electrical wiring and safety grounding
Electrical wiring: The cross-sectional area of the power line should meet the requirements of the equipment power, and it should be laid in metal pipes or PVC pipes. The spacing of pipe clamps should not exceed 1.5m. The wiring terminals should be firmly fixed, and the live wire, neutral wire, and ground wire should be clearly distinguished. Safety grounding: All equipment metal casings, dust collectors, and anti-static grounding systems must be reliably grounded, and the grounding resistance should be ≤ 4Ω. Control panel: The control panel should be installed at a convenient operation position (such as 1.5m above the wall surface) and ensure that the indicators of instruments such as differential pressure sensors, temperature and humidity sensors, etc. are accurate.
05 System commissioning and inspection and acceptance
Sealing and single-machine test: After the system installation is completed, a sealing test (such as a test pressure of 1500Pa) should be conducted to ensure that the leakage rate meets the design requirements. Start the equipment for single-machine testing to confirm that there is no abnormal noise or vibration from the motor, and the operating current does not exceed 10% of the rated value. System linkage and air volume balance: Conduct a system linkage test run to adjust the fan speed and air volume control valve. Select multiple points within the duct cross-section to measure the air volume, ensuring that the deviation from the design value is ≤ ±10% and precisely controlling the pressure difference between the clean area and the non-clean area (usually ≥ 10Pa). Cleanliness verification and acceptance: Under normal or static conditions, entrust a third-party institution with CMA/CNAS qualifications to conduct tests such as particle suspension and leak detection of high-efficiency filters (using PAO/DOP methods). During the acceptance process, complete documents such as unpacking inspection records, concealed works acceptance forms, and third-party test reports must be submitted.
