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Construction Technology of Secondary Distribution Pipelines in Microelectronics Enterprises
2026/9/1
Preconditions and preparations for construction
The secondary distribution piping operation should be carried out after the production equipment is in place, aligned, and accepted. Before construction, the following key preparatory work must be completed:
Based on the construction drawings， equipment template diagrams， and plant fluid matrix tables， check the equipment interface positions， pipe diameters， and fluid requirements， etc. Material inspection： All pipes， pipe fittings， and valves must have certificates of conformity and material certificates. For high-purity media， pipes (such as SUS316L EP grade stainless steel pipes) should be stored in double-layer sealed packaging to prevent contamination.
Pipeline prefabrication and clean operation
To avoid generating excessive pollution in the clean room， a large amount of pipeline prefabrication work should be carried out in a dedicated clean small room， and the cleanliness level of this area should not be lower than Class 100 (5-level).
The prefabricated pipelines and pipe fittings must undergo strict cleaning (such as degreasing， acid washing， and passivation) and be purged with high-purity nitrogen gas before being moved to the site for installation.
Key construction processes and specifications
High-purity gas pipeline welding： To ensure that the inner wall of the weld is smooth， without oxidation， and without particle generation， high-purity gas pipelines mainly use fully automatic track argon arc welding. Some small-diameter or specially required pipelines will use the compression connection method of brands such as Sylvestor. Clean room opening operation： When pipelines pass through elevated floors or wall panels， a dedicated opening tool must be used， and it is strictly prohibited to use chisels or flame cutting. During the opening process， a clean room-specific vacuum cleaner must be continuously used to remove dust， and the sealing of the opening must use stainless steel， aluminum， etc.， which are less likely to produce dust， and be sealed with silicone. Pipeline laying principles： The pipeline arrangement should be neat and beautiful， the direction should be reasonable for maintenance， and pipelines must not be laid on the operation surface of the equipment. Safety red line for pipe connections： It is strictly prohibited to directly open three-way pipe connections on the main system pipeline. It must be connected from the valve reserved behind to the equipment interface； if from a stopped pipeline connection， the medium in the valve after pipe must be drained， and flammable， explosive， or combustible media must be discharged to a safe place outside.
Key points of system testing and acceptance
After installation， strict testing must be carried out， which is the final line of defense to ensure the safety of the system：
Pressure and air tightness test： Pipes with a working pressure ≥ 0.1 MPa need to undergo a pressure test. For flammable， explosive， and combustible medium pipelines， an air tightness test must be conducted， and the test temperature must not approach the brittle transformation temperature of the material. Once the air tightness test is qualified， it must be re-tested after disassembly. Helium leak detection and purity detection： The system needs to undergo helium mass spectrometry leak detection to ensure the leakage rate meets the standard. Subsequently， purity detection of particles， moisture， oxygen content， etc. must be conducted， and the system must be purged with high-purity inert gas (purity not lower than the transported medium) to ensure the quality of the transported medium.
The entire construction process must be strictly implemented in accordance with national standards， such as "Microelectronics Production Equipment Installation Engineering Construction and Acceptance Specifications" (GB50467-2008) and the recent group standard "Technical Regulations for Secondary Distribution and Wiring of Electronic Industrial Production Equipment". The personnel usually need to have pressure pipeline construction qualifications (GC2 level and above) and relevant project experience.
