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Classification and Control of Contaminants in Clean Rooms

2026/5/13

To ensure that the semiconductor manufacturing process is carried out in a stable and reliable environment, and to guarantee product yield and equipment lifespan, strict and systematic control must be implemented for contaminants in the cleanroom and related controlled environments.
I. Classification of Contaminants (reduced by nature + form)
1. Main types of contaminants

2. Key classification dimensions
By particle size: ≥ 0.5 μm (for routine monitoring), ≥ 0.1 μm (for high-grade clean rooms, such as Class 1-10)
According to the hazards: lethal pollutants (toxic gases, pathogenic bacteria), functional pollutants (particles that affect product performance)
II. Core Control Measures (Derived from Different Aspects)
1. Source Control (Most Critical)
Personnel: Wear clean suits (covering from head to toe), pass-through shower for dust removal, prohibit bringing in cosmetics / Materials: Clean incoming materials, sealed transportation, go through transfer window / air lock chamber purification equipment: Select low-dust equipment, regular maintenance to avoid wear, exhaust and filtration treatment of equipment 2. Process Control (Dynamic Maintenance)
Air Purification: HEPA/ULPA filters (filtration efficiency ≥ 99.97% @ 0.3 μm), laminar air supply (vertical / horizontal)
Pressure control: Positive pressure in the clean room (to prevent external contamination from entering), pressure difference ≥ 10 Pa
Humidity and temperature control: Temperature 20-24℃, humidity 45-65% (to inhibit microorganisms + reduce static electricity)
Cleaning Management: Use lint-free cloths and dedicated cleaning agents. Do not use dry sweeping (to prevent dust).
3. Terminal Monitoring and Emergency Response
Real-time monitoring: Particle counter (particle concentration), microbial sampler, temperature and humidity / pressure difference sensor
Emergency handling: Increase the ventilation frequency when the standard is exceeded, isolate the contaminated area, and investigate the source of contamination (personnel / equipment / materials)
III. Key Indicators (Core Parameters)
Cleanliness level: ISO 14644-1 (Class 1 to 9), with a particular focus on ≥ 0.5 μm particle count
Air exchange frequency: ≥360 times/h for Class 100 grade, ≥200 times/h for Class 10,000 grade (adjust as needed)
Microbial limit: Pharmaceutical industry (GMP) ≤ 10 CFU/m³ (critical areas)