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Key technical points of dry cleanroom technology
2026/4/21
01 Core control indicators (quantitative compliance)
Cleanliness: According to ISO 14644-1 (levels 1-9), with particular emphasis on controlling particles of 0.1μm/0.5μm (such as ISO 1-2 for semiconductor use, ISO 5 for precision machinery); Temperature and humidity: Temperature 20-24℃ (±0.1-0.5℃ for precision processes), humidity 30%-50%RH (can reach 20%-30%RH in low-humidity scenarios), balancing anti-static and anti-cracking; Pressure difference: Positive pressure of the clean area relative to the non-clean area is 5-10Pa, and the gradient pressure difference between different cleanliness areas is 3-5Pa; Auxiliary indicators: Static voltage < 100V, noise ≤ 65dB(A), illuminance 300-500lx.
02 Airflow Distribution and Air Purification (Core Technology)
Airflow Design
High cleanliness level (ISO 1-5): Vertical unidirectional flow (HEPA/ULPA fully covered ceiling, air velocity 0.2-0.5m/s), floor return air; Medium-low cleanliness level (ISO 6-8): Non-unidirectional flow, sufficient air change rate (ISO 6 ≥ 200 times/h, ISO 7 ≥ 60 times/h, ISO 8 ≥ 20 times/h), side wall return air; Key point: Avoid air leakage, equipment reserved ≥ 30cm air flow channel, set air lock/buffer room to prevent cross-contamination.
2. Purification and Dehumidification
Filter classification: Pre-filtering (G3-G4) → Medium filtering (F5-F9) → High-efficiency/Ultra-high efficiency filtration (HEPA H13-H14/ULPA U15-U17), with a sealing leakage rate of ≤ 0.1%; Dehumidification scheme: Conventional low-humidity (freezing + rotor dehumidification), ultra-low humidity (stacked membrane separation/vacuum dehumidification), dehumidification units independently linked to the air conditioning system.
03 Three-dimensional enclosure structure and sealing (anti-permeation)
Materials: Color steel plate walls/ceilings (fireproof grade A), epoxy self-leveling floor/anti-static floor, tempered glass for doors and windows + double sealing; Sealing: Use neutral silicone sealant at the joints, fireproof sealing for pipeline penetrations + sealing, the airtightness of transfer windows/wind showers is ≥ 6 levels.
04 Pollution Prevention and Control (Full Process Management)
Personnel: Secondary changing + air shower (10-15 seconds), wearing anti-static clean suits, avoid rapid movement during operation; Materials: Transfer through transfer windows/air lock chambers, pre-treatment for dust removal, dust-free packaging; Equipment: Select equipment with low dust emission and no oil mist, leaving a gap of ≥10cm at the bottom, and conduct regular cleaning.
05 Energy Consumption and Maintenance (Stable Energy Saving)
Energy consumption optimization
Variable Air Volume (VAV) system adjusts the air volume on demand, recovers dehumidification and regeneration heat, and controls temperature in different zones; it uses high-efficiency fans and optimizes the design of air ducts to reduce resistance and energy consumption.
2. Operation and Maintenance
Daily monitoring: Real-time feedback on temperature, humidity, pressure difference, and cleanliness; Filter replacement: Pre-filter (pressure difference ≥ 150 Pa), medium filter (≥ 300 Pa), high-efficiency (≥ 500 Pa or non-compliant efficiency); Cleaning: Use dedicated dust-free tools and residue-free cleaning agents, use in separate areas to avoid cross-contamination; Regular testing: Conduct a comprehensive performance test in accordance with ISO 14644-3 every year, and provide personnel with standardized training.
Core summary: Centered around "precise temperature control, high cleanliness level, and complete anti-pollution measures, along with energy-saving operation and maintenance", we establish quantitative indicators and standardize processes to ensure long-term stable compliance.
